Clean room

The Cambridge Nanoscience Centre has a 663m2 cleanroom facility, which can be accessed by academic as well as industrial partners. The main lithography area is class 100. The rest of the cleanroom is divided into three class 10,000 areas. The class number refers to the maximum number of particles 0.5μm in diameter allowed in one cubic foot of cleanroom air. The cleanroom is equipped with state-of-the-art high-resolution e-beam, photo and nanoimprint lithography equipment.

Laboratories

The Cambridge Nanoscience Centre has a 554m2 laboratory area split up into 15 separate ‘modules’. Seven of these modules have vibration isolated floors that are used to house vibration sensitive microscopes and optical/laser systems. The remaining modules contain state-of-the-art characterisation equipment.

Offices

The open plan office area provides desk space for approximately 40 researchers and students with a further 9 offices for academic, administration and technical staff. There is also a meeting room with full video teleconferencing facilities.